Xtirm-FC-300 概覽
Xtirm-FC-300 Overview
技術(shù)實(shí)力雄厚,專業(yè)的營銷設(shè)計團(tuán)隊
Strengthen service. sales & marketing, design expertise
質(zhì)量認(rèn)證
Manufacture cleaners under ISO 9001 quality control IS09001
操作簡便、維護(hù)成本低
Reduce overhead costs and more efficient operations
交貨周期短,技術(shù)支持迅捷
Provide shorter lead-time and improvedtechnical support
半導(dǎo)體行業(yè)客戶認(rèn)可度高
Highly focused on repeat orders from existing semi customers
Xtrim-FC-300 介紹
Xtrim-FC-300 introduction
在清洗機(jī)行業(yè)超25年經(jīng)驗(yàn)
Over 25 years of experience in cleaning equipment business
在上海,蘇州有完善的服務(wù)和銷售團(tuán)隊
Full sales and warranty support in Shanghai
自主研發(fā)設(shè)計,生產(chǎn)、服務(wù),可用于片盒、FOUP、光罩盒清洗
Designed,manufactured and serviced box/-FOUP/FOSB/MASKPOD cleaners
產(chǎn)品特點(diǎn)
Features
3rd Generation process cleaner for 50mm - 300m wafer handing products
針對2-12寸晶圓的第三代清洗設(shè)備
High-purity materials, PP, PVDF 316 suS, etc
適用于各種材質(zhì)盒子,包括PP、PVD......
Front load/unload, or optional front load & back unload ftor bulk mounting
前載/前卸、前載/后卸等多種設(shè)計模式
Standard heated blower drying usingfab air
標(biāo)準(zhǔn)廠務(wù)熱空氣干量
Optional heated CDAN2 drving
熱CDA、N2干燥可選
Standard ambient DIW cleaning
標(biāo)準(zhǔn)DIW清洗容器
Small footprint ideal for cleanroom
無塵室盡可能小的占地設(shè)計
Maximum throughput in the industry
產(chǎn)能盡可能大的設(shè)計
Outstanding local support and spare parts avalilbility
技術(shù)支持實(shí)力雄厚,備件齊全
Lowestmaintenance,high MTBF &uptime
維護(hù)成本低,故障率低
-Manually load shipping boxes, Mask Pod or other wafer handling products in the custom-designed racks in the machine
手動取放盒子,可根據(jù)客戶要求設(shè)計方案
-Washing, rinsing and drving are fuilly automated when the operator verifies that the parts are securely loaded on all four racks and the machine door closed properly, before pressing the GO button on thetouch screen
自動化洗烘,一鍵啟動
All spinning speeds and directions will be automatically controled through the HMI
人機(jī)界面控制參數(shù)